High deposition rate a-Si:H for the flat panel display industry

Authors: 
J. Hautala, Z. M. Saleh, J.F.M. Westendorp, H. Meiling, S. Sherman and S. Wagner
ISSN: 
0000-0000
Journal Name: 
Proc. of the Materials Research Society
Volume: 
10
Issue: 
1
Pages From: 
1
To: 
5
Date: 
Wednesday, January 1, 1997